Campbell, Fabrication Engineering at the Micro- and Nanoscale, 4e

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

Instructor Resources for this title are available on the book's Companion Website

Errata for the Fourth Edition